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RTL1200-PECVD ROTATING PECVD

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TL1200 - PECVD system is composed of TL1200 vacuum tube furnace, quartz vacuum chamber, rf power supply, GX gas supply system, pumping system and vacuum measurement system.
Main features:
1. The gas in quartz vacuum chamber is changed into ionic state by rf power supply.
2. PECVD is lower than normal CVD for chemical vapor deposition.
3. The stress of the deposited films can be controlled by the frequency of rf power supply.
4. PECVD has high deposition rate, good uniformity, consistency and stability than normal CVD.
5. Widely used in the growth of various films, such as SiOx, SiNx, SiOxNy and amorphous silicon (a-si: H), etc.
 
The TL1200 - PECVD system technique to the Swedish Kanthal resistance wire heating element, using double shell structure and 30 program temperature control table, phase-shifting trigger, thyristor control, furnace using polycrystalline alumina fiber material, can stainless steel flange seal on both ends of the furnace tube, stainless steel flange installation have a mouth, valve and pressure gauge, vacuum, vacuum degree can reach 10-3 Pa, low temperature field balancing, surface temperature, lift temperature rate, energy saving, price concessions, etc.
 
1. Kanthal A1 resistance wire of Sweden
                   

     Kanthal A1 Original wire            Chinese resistance wire furnace              VS       Imported resistance wire furnace

(1), high surface temperature can reach 1420 ℃
(2) the surface is stainless steel (very bright, the customer should pay attention to it), it will not rust, and the use time will not fall off the slag.
(3) data of Kanthal resistance wire is downloaded
(4) Kanthal resistance wire website: www.kanthal.com
(5) the resistance is balanced and the temperature field is equally good
 
Most of the manufacturers use fe-cr-al Alloy doped by Mo resistance wire, which                  
Sometimes the resistance is uneven and part of the heat is small                                           Kanthal A1 resistance is uniform and heat balanced, good Temperature field                                                                                                                                                                         effect
 
2. Installation of air switch and leakage protector:
When an electric current or leakage, an empty meeting automatically disconnects.

 

 

3. Can connect with computer

This furnace is equipped with communication interface and software, can be directly through the furnace computer control of each parameter, and can be observed from the computer PV on the stove and SV temperature value and instrument operation, the actual temperature of the furnace curve drawing computer real time, and can keep the temperature data of each time, can call up at any time
 

 

 

4. Chamber 

   

(1) High quality high pure alumina polycrystalline fiber cured furnace with vacuum suction and filter molding.

(2). Adopt Japanese technology to form.
(3). The spacing and pitch of the resistance wire in the furnace are arranged according to the best thermal technology of Japan, and the temperature field is simulated by thermal software

 

(4). Using 4 weeks heating, the temperature is more balanced
 

5. optional UL certified electrical board (all through the UL certification of imported electrical appliances)

 

 

6. Trigger

    VS    

Soft-start current limiting trigger                                         Most manufacturers use non-limiting Xiamen Bode triggers

1 phase shift trigger (with soft start and current limiting function)
2. Current limiting function no matter how to adjust the heating time we electric furnace after the transformer secondary current is limited to 170A or less limited protection of the equipment.  Non-limiting trigger if the heating rate is set incorrectly or too fast
                      Low current current is very large the device will trip or burn out.
3 soft-start function the current will slowly increase the current the impact of the heating element is small is conducive to the extension of the life of the heating element
4 the protection function If the current exceeds the limit current the trigger will automatically cut off the trigger function to cut off the current protection furnace.
 

7. UL certified transformer

 

1 the transformer cable is pure copper
2 the transformer sound small
3 the transformer temperature is low

8. A variety of options to choose a variety of flanges (diameter from 25 to 250mm)

                           
                   

 

9. Certification

     

 

RTL1200

 

Model

RTL1200-PECVD

Power

3.5KW

Chamber size

Dia 60(OD)X1400mm

Overall size(LXDXH)

1300X420X1200

Input voltage

220V

Phase

Single

Heating element

Swedish Kanthal A1 imported resistance wire (resistance wire guaranteed for 2 years)

Control system

 

Using the yu electric program control thermometer (standard) 

1. 30 program control temperature intelligent PID adjustment. 

2, over temperature protection is broken accidentally protection with a temperature or broken accidentally electric furnace heating circuit automatically cut OFF, and, when the temperature of the furnace more than 1200 degrees or thermocouple burn out, the main circuit of ac relay will automatically disconnect, main circuit disconnect, panel ON lights, OFF the light, the limited protection electric furnace). 

3. With 485 communication interface (standard and standard for choosing software) 

4. It has the function of power failure protection, that is, when the power is off, the program will not start up from the beginning temperature, but the furnace will start to rise when the power is off. 

5. The instrument has the function of temperature self-tuning

(Optional)

                                                                                 

SHIMADEN FP93                    EUROTHERM                                 Touch screen instrument

Temperature Stabilizing

PID

Broken even protection and display

 Yes

over-temperature protection

 Yes

overcurrent protection

 Yes

Chamber material

1. High quality high pure alumina polycrystalline fiber cured furnace with vacuum suction and filter molding. 

2. Adopt Japanese technology to form. 

3. The spacing and pitch of the resistance wire in the furnace are arranged according to the best thermal technology of Japan, and the temperature field is simulated by thermal software

control precision

+/- 1 ℃

Trigger

Phase-shifted trigger

electric appliance

Zhejiang chint

silicon controlled

106/16E SEMIKRON

maximum temperature

1200 ℃

rated temperature

1100 ℃

heating rate

≤20 ℃/ Min (adjustable)

Recommended heating rate

≤10℃/ Min

Thermocouple Type

K

heating-length

400mm

Vacuum flanges

1. To increase the pumping rate, achieve a higher vacuum requirement. The original hose connector can be replaced with the kf-25 interface (VS -0.1 and VS high vacuum system interface are KF25).

2, such as used for gas supply system, can be replaced the original hose connection into Φ 6.35 mm double card sleeve joint.

Rotary motor power

 40W

Electric push rod power

40W

Furnace tilt Angle

 -10~30°

Tube rotation rate

Variable speed motor speed can be adjusted between 1-25 RPM

Rotating seal mode

 Use rotating magnetic fluid seal

Surrounding surface temperature

≤45℃

Radio frequency (rf) power supply (plasma generator)

 

Power output range

  0-500W

Maximum reflected power

  10W

signal frequency

  13.56MHZ±0.005%

Cooling mode

  air cooling

Input power

  208-240V  50/60HZ

 

GX Main parameters of the gas supply system

 

Flow control and testing are adopted

 D07-7C

mass flowmeter

STANDARD RANGE

Adopt a proton flow controller       5、10、20、30、50、100、200、300、500SCCM、1、2、3、5、10SLM  (You can choose the range and the type of the gas)

maximum working pressure

3MP

degree of accuracy

 ±1.5%

air pressure drop

<0.01mpa< p="">



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